A novel 2-step ALD route to ultra-thin MoS2films on SiO2through a surface organometallic intermediate
出版年份 2017 全文链接
标题
A novel 2-step ALD route to ultra-thin MoS2films on SiO2through a surface organometallic intermediate
作者
关键词
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出版物
Nanoscale
Volume 9, Issue 2, Pages 538-546
出版商
Royal Society of Chemistry (RSC)
发表日期
2016-09-26
DOI
10.1039/c6nr06021h
参考文献
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