Layer-Controlled, Wafer-Scale, and Conformal Synthesis of Tungsten Disulfide Nanosheets Using Atomic Layer Deposition

Published 2013 View Full Article

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Title
Layer-Controlled, Wafer-Scale, and Conformal Synthesis of Tungsten Disulfide Nanosheets Using Atomic Layer Deposition
Authors
Keywords
-
Journal
ACS Nano
Volume 7, Issue 12, Pages 11333-11340
Publisher
American Chemical Society (ACS)
Online
2013-11-20
DOI
10.1021/nn405194e

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