Tetraoxa-Diphosphaspiro Derivative as Suppressor for Microvia Filling by Copper Electroplating in Acidic Solution
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Title
Tetraoxa-Diphosphaspiro Derivative as Suppressor for Microvia Filling by Copper Electroplating in Acidic Solution
Authors
Keywords
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Journal
JOURNAL OF THE ELECTROCHEMICAL SOCIETY
Volume 164, Issue 14, Pages D1034-D1041
Publisher
The Electrochemical Society
Online
2017-12-29
DOI
10.1149/2.0131802jes
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