Vertical Silicon Nanowire Field Effect Transistors with Nanoscale Gate-All-Around
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Title
Vertical Silicon Nanowire Field Effect Transistors with Nanoscale Gate-All-Around
Authors
Keywords
Plasma Etching, Subthreshold Slope, Short Channel Effect, CMOS Inverter, Drain Induce Barrier Lowering
Journal
Nanoscale Research Letters
Volume 11, Issue 1, Pages -
Publisher
Springer Nature
Online
2016-04-19
DOI
10.1186/s11671-016-1396-7
References
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