Vertical Silicon-Nanowire Formation and Gate-All-Around MOSFET

Title
Vertical Silicon-Nanowire Formation and Gate-All-Around MOSFET
Authors
Keywords
-
Journal
IEEE ELECTRON DEVICE LETTERS
Volume 29, Issue 7, Pages 791-794
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2008-07-09
DOI
10.1109/led.2008.2000617

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