标题
Vertical Silicon Nanowire Field Effect Transistors with Nanoscale Gate-All-Around
作者
关键词
Plasma Etching, Subthreshold Slope, Short Channel Effect, CMOS Inverter, Drain Induce Barrier Lowering
出版物
Nanoscale Research Letters
Volume 11, Issue 1, Pages -
出版商
Springer Nature
发表日期
2016-04-19
DOI
10.1186/s11671-016-1396-7
参考文献
相关参考文献
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