Sub-diffraction demagnification imaging lithography by hyperlens with plasmonic reflector layer
Published 2016 View Full Article
- Home
- Publications
- Publication Search
- Publication Details
Title
Sub-diffraction demagnification imaging lithography by hyperlens with plasmonic reflector layer
Authors
Keywords
-
Journal
RSC Advances
Volume 6, Issue 98, Pages 95973-95978
Publisher
Royal Society of Chemistry (RSC)
Online
2016-09-26
DOI
10.1039/c6ra17098f
References
Ask authors/readers for more resources
Related references
Note: Only part of the references are listed.- Enhancing aspect profile of half-pitch 32 nm and 22 nm lithography with plasmonic cavity lens
- (2015) Ping Gao et al. APPLIED PHYSICS LETTERS
- Ultrabroadband superoscillatory lens composed by plasmonic metasurfaces for subdiffraction light focusing
- (2015) Dongliang Tang et al. Laser & Photonics Reviews
- Fabrication of anisotropically arrayed nano-slots metasurfaces using reflective plasmonic lithography
- (2015) Jun Luo et al. Nanoscale
- Going far beyond the near-field diffraction limit via plasmonic cavity lens with high spatial frequency spectrum off-axis illumination
- (2015) Zeyu Zhao et al. Scientific Reports
- Improving Imaging Contrast of Non-Contacted Plasmonic Lens by Off-Axis Illumination with High Numerical Aperture
- (2014) Qizhao Huang et al. Plasmonics
- Off Axis Illumination Planar Hyperlens for Non-contacted Deep Subwavelength Demagnifying Lithography
- (2014) Wei Zhang et al. Plasmonics
- A method for uniform demagnification imaging beyond the diffraction limit: cascaded planar hyperlens
- (2013) Xing Tao et al. APPLIED PHYSICS B-LASERS AND OPTICS
- Deep sub-wavelength imaging lithography by a reflective plasmonic slab
- (2013) Changtao Wang et al. OPTICS EXPRESS
- Superlens imaging with a surface plasmon polariton cavity in imaging space
- (2013) Fuyang Xu et al. OPTICS LETTERS
- Subwavelength Demagnification Imaging and Lithography Using Hyperlens with a Plasmonic Reflector Layer
- (2013) Guowei Ren et al. Plasmonics
- High Aspect Subdiffraction-Limit Photolithography via a Silver Superlens
- (2012) Hong Liu et al. NANO LETTERS
- Breaking the imaging symmetry in negative refraction lenses
- (2012) Changbao Ma et al. OPTICS EXPRESS
- A super resolution metalens with phase compensation mechanism
- (2010) Changbao Ma et al. APPLIED PHYSICS LETTERS
- A smooth optical superlens
- (2010) Pratik Chaturvedi et al. APPLIED PHYSICS LETTERS
- Spherical hyperlens for two-dimensional sub-diffractional imaging at visible frequencies
- (2010) Junsuk Rho et al. Nature Communications
- A simple design of flat hyperlens for lithography and imaging with half-pitch resolution down to 20 nm
- (2009) Yi Xiong et al. APPLIED PHYSICS LETTERS
- Ray Optics at a Deep-Subwavelength Scale: A Transformation Optics Approach
- (2008) Seunghoon Han et al. NANO LETTERS
- Ultrasmooth Silver Thin Films Deposited with a Germanium Nucleation Layer
- (2008) Logeeswaran VJ et al. NANO LETTERS
- Superlenses to overcome the diffraction limit
- (2008) Xiang Zhang et al. NATURE MATERIALS
- Flying plasmonic lens in the near field for high-speed nanolithography
- (2008) Werayut Srituravanich et al. Nature Nanotechnology
- Subwavelength imaging with anisotropic structure comprising alternately layered metal and dielectric films
- (2008) Changtao Wang et al. OPTICS EXPRESS
- Far-field imaging device: planar hyperlens with magnification using multi-layer metamaterial
- (2008) Wei Wang et al. OPTICS EXPRESS
Become a Peeref-certified reviewer
The Peeref Institute provides free reviewer training that teaches the core competencies of the academic peer review process.
Get StartedAsk a Question. Answer a Question.
Quickly pose questions to the entire community. Debate answers and get clarity on the most important issues facing researchers.
Get Started