A simple design of flat hyperlens for lithography and imaging with half-pitch resolution down to 20 nm

Published 2009 View Full Article

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Title
A simple design of flat hyperlens for lithography and imaging with half-pitch resolution down to 20 nm
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 94, Issue 20, Pages 203108
Publisher
AIP Publishing
Online
2009-05-22
DOI
10.1063/1.3141457
References
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