Crucial role of reactive pulse-gas on a sputtered Zn3N2 thin film formation
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Title
Crucial role of reactive pulse-gas on a sputtered Zn3N2 thin film formation
Authors
Keywords
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Journal
RSC Advances
Volume 6, Issue 97, Pages 94905-94910
Publisher
Royal Society of Chemistry (RSC)
Online
2016-09-22
DOI
10.1039/c6ra09972f
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