Crucial role of reactive pulse-gas on a sputtered Zn3N2 thin film formation

Effect of sputtering pressure on structure and dielectric properties of bismuth magnesium niobate thin films prepared by RF magnetron sputtering

(2016) Libin Gao et al.   THIN SOLID FILMS

Energy and substance transfer in magnetron sputtering systems with liquid-phase target

(2016) G.A. Bleykher et al.   VACUUM

Texture orientation of silver thin films grown via gas-timing radio frequency magnetron sputtering and their SERS activity

(2016) Pongbordin Ukahapunyakul et al.   RSC Advances

Oxygen-Doped Zinc Nitride as a High-Mobility Nitride-Based Semiconductor

(2015) Xiang Cao et al.   Journal of Physical Chemistry C

Atomic layer deposition of Zn3N2 thin films: growth mechanism and application in thin film transistor

(2015) Soumyadeep Sinha et al.   RSC Advances

Effect of the oxidation temperature on microstructure and conductivity of ZnxNy thin films and their conversion into p-type ZnO:N films

(2013) N.H. Erdogan et al.   APPLIED SURFACE SCIENCE

Thin film transistors based on zinc nitride as a channel layer for optoelectronic devices

(2012) C. García Núñez et al.   APPLIED PHYSICS LETTERS

Zinc nitride films prepared by reactive RF magnetron sputtering of zinc in nitrogen containing atmosphere

(2012) Nanke Jiang et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Oxidation of Zn in UHV environment at low temperature

(2011) Suttinart Noothongkaew et al.   APPLIED SURFACE SCIENCE

Target voltage behaviour of a vanadium-oxide thin film during reactive magnetron sputtering

(2011) Tao Wang et al.   Chinese Physics B

Substrate-dependent Internal Stress of Aluminum-doped Zinc-oxide Thin Films Deposited by DC Magnetron Sputtering

(2011) Taewon Kim   JOURNAL OF THE KOREAN PHYSICAL SOCIETY

Reactive radio frequency sputtering deposition and characterization of zinc nitride and oxynitride thin films

(2011) Nanke Jiang et al.   THIN SOLID FILMS

On the zinc nitride properties and the unintentional incorporation of oxygen

(2011) C. García Núñez et al.   THIN SOLID FILMS

Structural and electrical characteristics of high quality (100) orientated-Zn3N2 thin films grown by radio-frequency magnetron sputtering

(2010) G. Z. Xing et al.   JOURNAL OF APPLIED PHYSICS

Internal Stress Dependence of Aluminum Doped Zinc Oxide Thin Films Deposited by DC Magnetron Sputter on Deposition Conditions

(2010) T. KIM et al.   JOURNAL OF THE KOREAN PHYSICAL SOCIETY

Properties of n-type ZnN thin films as channel for transparent thin film transistors

(2009) E. Aperathitis et al.   THIN SOLID FILMS

Local structure of indium oxynitride from x-ray absorption spectroscopy

(2008) J. T-Thienprasert et al.   APPLIED PHYSICS LETTERS

Photomodulated reflectance study on optical property of InN thin films grown by reactive gas-timing rf magnetron sputtering

(2008) S. Porntheeraphat et al.   APPLIED SURFACE SCIENCE

An extreme change in structural and optical properties of indium oxynitride deposited by reactive gas-timing RF magnetron sputtering

(2008) A. Sungthong et al.   APPLIED SURFACE SCIENCE

High-dielectric constant AlON prepared by RF gas-timing sputtering for high capacitance density

(2008) A. Poyai et al.   MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING

Effect of gas-timing technique on structure and optical properties of sputtered zinc oxide films

(2007) Don Klaitabtim et al.   CERAMICS INTERNATIONAL

Hysteresis-free reactive high power impulse magnetron sputtering

(2007) E. Wallin et al.   THIN SOLID FILMS