Atomic Layer Deposition of Functional Layers for on Chip 3D Li-Ion All Solid State Microbattery
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Title
Atomic Layer Deposition of Functional Layers for on Chip 3D Li-Ion All Solid State Microbattery
Authors
Keywords
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Journal
Advanced Energy Materials
Volume 7, Issue 2, Pages 1601402
Publisher
Wiley
Online
2016-10-13
DOI
10.1002/aenm.201601402
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