Atomic Layer Deposition of Functional Layers for on Chip 3D Li-Ion All Solid State Microbattery
出版年份 2016 全文链接
标题
Atomic Layer Deposition of Functional Layers for on Chip 3D Li-Ion All Solid State Microbattery
作者
关键词
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出版物
Advanced Energy Materials
Volume 7, Issue 2, Pages 1601402
出版商
Wiley
发表日期
2016-10-13
DOI
10.1002/aenm.201601402
参考文献
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