Synthesis of ion conducting LixAlySizO thin films by atomic layer deposition
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Title
Synthesis of ion conducting LixAlySizO thin films by atomic layer deposition
Authors
Keywords
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Journal
Journal of Materials Chemistry A
Volume 2, Issue 25, Pages 9566-9573
Publisher
Royal Society of Chemistry (RSC)
Online
2014-04-01
DOI
10.1039/c3ta14928e
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