Deterministic and Monte Carlo methods for simulation of plasma-surface interactions

Plasma–catalysis: the known knowns, the known unknowns and the unknown unknowns

(2016) J Christopher Whitehead   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Molecular Dynamics Simulations for Plasma-Surface Interactions

(2016) Erik C. Neyts et al.   Plasma Processes and Polymers

Dynamical Monte Carlo methods for plasma-surface reactions

(2016) Vasco Guerra et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY

Direct observation of realistic-temperature fuel combustion mechanisms in atomistic simulations

(2016) Kristof M. Bal et al.   Chemical Science

Multiscale modeling and operation of PECVD of thin film solar cells

(2015) Marquis Crose et al.   CHEMICAL ENGINEERING SCIENCE

Plasma Catalysis: Synergistic Effects at the Nanoscale

(2015) Erik C. Neyts et al.   CHEMICAL REVIEWS

Key plasma parameters for nanometric precision etching of Si films in chlorine discharges

(2015) P. Brichon et al.   JOURNAL OF APPLIED PHYSICS

Atomic Oxygen Recombination at Surface Defects on Reconstructed (0001) α-Quartz Exposed to Atomic and Molecular Oxygen

(2015) Rubén Meana-Pañeda et al.   Journal of Physical Chemistry C

Interaction of F atoms with SiOCH ultra-low-kfilms: I. Fluorination and damage

(2015) T V Rakhimova et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Interaction of F atoms with SiOCH ultra low-k films. Part II: etching

(2015) T V Rakhimova et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Plasma-Surface Interactions in Plasma Catalysis

(2015) Erik C. Neyts   PLASMA CHEMISTRY AND PLASMA PROCESSING

First-principle study of atomic oxygen and nitrogen adsorption on (111) β-cristobalite as a model of thermal protection coverage

(2014) A.A. Buchachenko et al.   ACTA ASTRONAUTICA

Adsorption and reactivity of nitrogen atoms on silica surface under plasma exposure

(2014) D Marinov et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

NO oxidation on plasma pretreated Pyrex: the case for a distribution of reactivity of adsorbed O atoms

(2014) Vasco Guerra et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Plasma–catalyst coupling for volatile organic compound removal and indoor air treatment: a review

(2014) F Thevenet et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Kinetic modelling of heterogeneous catalytic systems

(2014) Michail Stamatakis   JOURNAL OF PHYSICS-CONDENSED MATTER

A molecular dynamics simulation of hydrogen atoms collisions on an H-preadsorbed silica surface

(2014) M Rutigliano et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY

The Kinetic Monte Carlo Method as a Way To Solve the Master Equation for Interstellar Grain Chemistry

(2013) H. M. Cuppen et al.   CHEMICAL REVIEWS

Plasma processing of low-k dielectrics

(2013) Mikhail R. Baklanov et al.   JOURNAL OF APPLIED PHYSICS

Elementary processes of H2 plasma-graphene interaction: A combined molecular dynamics and density functional theory study

(2013) E. Despiau-Pujo et al.   JOURNAL OF APPLIED PHYSICS

A hybrid kinetic Monte Carlo method for simulating silicon films grown by plasma-enhanced chemical vapor deposition

(2013) D. G. Tsalikis et al.   JOURNAL OF CHEMICAL PHYSICS

The Structure of Silica Surfaces Exposed to Atomic Oxygen

(2013) Paul Norman et al.   Journal of Physical Chemistry C

Plasma etching: Yesterday, today, and tomorrow

(2013) Vincent M. Donnelly et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Oxygen Adsorption on β-Quartz Model Surfaces: Some Insights from Density Functional Theory Calculations and Semiclassical Time-Dependent Dynamics

(2012) Costantino Zazza et al.   JOURNAL OF PHYSICAL CHEMISTRY A

Oxygen Interactions with Silica Surfaces: Coupled Cluster and Density Functional Investigation and the Development of a New ReaxFF Potential

(2012) Anant D. Kulkarni et al.   Journal of Physical Chemistry C

Critical review: Plasma-surface reactions and the spinning wall method

(2011) V. M. Donnelly et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Evidence of atomic adsorption on TiO2 under plasma exposure and related C2H2 surface reactivity

(2010) O. Guaitella et al.   APPLIED PHYSICS LETTERS

Production of molecules on a surface under plasma exposure: example of NO on pyrex

(2010) D Marinov et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Surface recombination of oxygen atoms in O2plasma at increased pressure: I. The recombination probability and phenomenological model of surface processes

(2010) D V Lopaev et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Direct Detection of NO Produced by High-Temperature Surface-Catalyzed Atom Recombination

(2010) Dusan A. Pejakovic et al.   JOURNAL OF THERMOPHYSICS AND HEAT TRANSFER

Experimental and modeling study of O and Cl atoms surface recombination reactions in O2 and Cl2 plasmas

(2010) Luc Stafford et al.   PURE AND APPLIED CHEMISTRY

Crystallinity and microstructure in Si films grown by plasma-enhanced chemical vapor deposition: A simple atomic-scale model validated by experiments

(2009) P. L. Novikov et al.   APPLIED PHYSICS LETTERS

Studies of chlorine-oxygen plasmas and evidence for heterogeneous formation of ClO and ClO2

(2009) Joydeep Guha et al.   JOURNAL OF APPLIED PHYSICS

Oxygen Adsorption on β-Cristobalite Polymorph: Ab Initio Modeling and Semiclassical Time-Dependent Dynamics†

(2009) M. Rutigliano et al.   JOURNAL OF PHYSICAL CHEMISTRY A

Investigation of etching and deposition processes of Cl2/O2/Ar inductively coupled plasmas on silicon by means of plasma–surface simulations and experiments

(2009) S Tinck et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Molecular dynamics for low temperature plasma–surface interaction studies

(2009) David B Graves et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Resemblance in gas composition of Ar–N2–O2plasmas and Ar–NO plasmas

(2009) J H van Helden et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY

Finding stable α-quartz (0001) surface structures via simulations

(2008) Yun-Wen Chen et al.   APPLIED PHYSICS LETTERS

In-Situ Surface Recombination Measurements of Oxygen Atoms on Anodized Aluminum in an Oxygen Plasma

(2008) Joydeep Guha et al.   Journal of Physical Chemistry C