Studies of chlorine-oxygen plasmas and evidence for heterogeneous formation of ClO and ClO2

Title
Studies of chlorine-oxygen plasmas and evidence for heterogeneous formation of ClO and ClO2
Authors
Keywords
-
Journal
JOURNAL OF APPLIED PHYSICS
Volume 105, Issue 11, Pages 113307
Publisher
AIP Publishing
Online
2009-06-12
DOI
10.1063/1.3129543

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