Resemblance in gas composition of Ar–N2–O2plasmas and Ar–NO plasmas

Published 2009 View Full Article

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Title
Resemblance in gas composition of Ar–N2–O2plasmas and Ar–NO plasmas
Authors
Keywords
-
Journal
PLASMA SOURCES SCIENCE & TECHNOLOGY
Volume 18, Issue 2, Pages 025020
Publisher
IOP Publishing
Online
2009-03-07
DOI
10.1088/0963-0252/18/2/025020

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