Effects of Al Doping on the Properties of ZnO Thin Films Deposited by Atomic Layer Deposition
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Title
Effects of Al Doping on the Properties of ZnO Thin Films Deposited by Atomic Layer Deposition
Authors
Keywords
Al-doped ZnO thin films, Atomic layer deposition, Optical properties, Spectroscopic ellipsometry, Electrical properties
Journal
Nanoscale Research Letters
Volume 11, Issue 1, Pages -
Publisher
Springer Nature
Online
2016-09-17
DOI
10.1186/s11671-016-1625-0
References
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