Effects of Al Doping on the Properties of ZnO Thin Films Deposited by Atomic Layer Deposition

Title
Effects of Al Doping on the Properties of ZnO Thin Films Deposited by Atomic Layer Deposition
Authors
Keywords
Al-doped ZnO thin films, Atomic layer deposition, Optical properties, Spectroscopic ellipsometry, Electrical properties
Journal
Nanoscale Research Letters
Volume 11, Issue 1, Pages -
Publisher
Springer Nature
Online
2016-09-17
DOI
10.1186/s11671-016-1625-0

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