Adsorption mechanism of dimeric Ga precursors in metalorganic chemical vapor deposition of gallium nitride

Title
Adsorption mechanism of dimeric Ga precursors in metalorganic chemical vapor deposition of gallium nitride
Authors
Keywords
-
Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 41, Issue 6, Pages -
Publisher
American Vacuum Society
Online
2023-10-31
DOI
10.1116/6.0002966

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