Adsorption mechanism of dimeric Ga precursors in metalorganic chemical vapor deposition of gallium nitride
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Title
Adsorption mechanism of dimeric Ga precursors in metalorganic chemical vapor deposition of gallium nitride
Authors
Keywords
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Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 41, Issue 6, Pages -
Publisher
American Vacuum Society
Online
2023-10-31
DOI
10.1116/6.0002966
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