Low-Temperature Atomic Layer Deposition of Highly Conformal Tin Nitride Thin Films for Energy Storage Devices

Published 2019 View Full Article

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Title
Low-Temperature Atomic Layer Deposition of Highly Conformal Tin Nitride Thin Films for Energy Storage Devices
Authors
Keywords
-
Journal
ACS Applied Materials & Interfaces
Volume 11, Issue 46, Pages 43608-43621
Publisher
American Chemical Society (ACS)
Online
2019-10-21
DOI
10.1021/acsami.9b15790

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