Triaxial piezoresistive force sensor probe with high sensitivity and stiffness using 3D notch structure

Conveyance of texture signals along a rat whisker

(2021) Maysam Oladazimi et al.   Scientific Reports

Physical Sensors Based on Laser-Induced Graphene: A Review

(2020) Altynay Kaidarova et al.   IEEE SENSORS JOURNAL

A MEMS-based measurement system for evaluating the force-length relationship of human induced pluripotent stem cell-derived cardiomyocytes adhered on a substrate

(2019) Kenei Matsudaira et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Spring constant measurement using a MEMS force and displacement sensor utilizing paralleled piezoresistive cantilevers

(2018) Sumihiro Kohyama et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Small-Scale Biological and Artificial Multidimensional Sensors for 3D Sensing

(2018) Kriti Agarwal et al.   Small

Three-dimensional piezoelectric MEMS actuator by using sputtering deposition of Pb(Zr,Ti)O3 on microstructure sidewalls

(2017) Kensuke Kanda et al.   Smart Materials and Structures

A self-decoupling piezoresistive sensor for measuring microforce in horizontal and vertical directions

(2016) Jie Zhou et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Rigid two-axis MEMS force plate for measuring cellular traction force

(2016) Hidetoshi Takahashi et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Multi-Dimensional MEMS/Micro Sensor for Force and Moment Sensing: A Review

(2014) Qiaokang Liang et al.   IEEE SENSORS JOURNAL

MEMS two-axis force plate array used to measure the ground reaction forces during the running motion of an ant

(2014) Hidetoshi Takahashi et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Design of a piezoresistive triaxial force sensor probe using the sidewall doping method

(2013) Tetsuo Kan et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

A triaxial tactile sensor without crosstalk using pairs of piezoresistive beams with sidewall doping

(2013) Hidetoshi Takahashi et al.   SENSORS AND ACTUATORS A-PHYSICAL

Forty-Five Degree Micromirror Fabrication Using Silicon Anisotropic Etching with Surfactant-Added Tetramethylammonium Hydroxide Solution

(2010) Hiroyuki Yagyu et al.   JAPANESE JOURNAL OF APPLIED PHYSICS

Fabrication of novel microstructures based on orientation-dependent adsorption of surfactant molecules in a TMAH solution

(2010) Prem Pal et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

A Six-Axis MEMS Force–Torque Sensor With Micro-Newton and Nano-Newtonmeter Resolution

(2009) F. Beyeler et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

Three-axis micro-force sensor with sub-micro-Newton measurement uncertainty and tunable force range

(2009) S Muntwyler et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Probing the mechanical architecture of the vertebrate meiotic spindle

(2009) Takeshi Itabashi et al.   NATURE METHODS

Review: Semiconductor Piezoresistance for Microsystems

(2009) A.A. Barlian et al.   PROCEEDINGS OF THE IEEE