Three-dimensional piezoelectric MEMS actuator by using sputtering deposition of Pb(Zr,Ti)O3 on microstructure sidewalls

Published 2017 View Full Article

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Title
Three-dimensional piezoelectric MEMS actuator by using sputtering deposition of Pb(Zr,Ti)O3 on microstructure sidewalls
Authors
Keywords
-
Journal
Smart Materials and Structures
Volume 26, Issue 4, Pages 045019
Publisher
IOP Publishing
Online
2017-02-22
DOI
10.1088/1361-665x/aa61eb

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