Statics and dynamics of an underwater electrostatic curved electrode actuator with rough surfaces
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Title
Statics and dynamics of an underwater electrostatic curved electrode actuator with rough surfaces
Authors
Keywords
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Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 33, Issue 12, Pages 125003
Publisher
IOP Publishing
Online
2023-09-16
DOI
10.1088/1361-6439/acfa0b
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