Statics and dynamics of an underwater electrostatic curved electrode actuator with rough surfaces

标题
Statics and dynamics of an underwater electrostatic curved electrode actuator with rough surfaces
作者
关键词
-
出版物
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 33, Issue 12, Pages 125003
出版商
IOP Publishing
发表日期
2023-09-16
DOI
10.1088/1361-6439/acfa0b

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