Mechanisms of tool-workpiece interaction in ultraprecision diamond turning of single-crystal SiC for curved microstructures
Published 2023 View Full Article
- Home
- Publications
- Publication Search
- Publication Details
Title
Mechanisms of tool-workpiece interaction in ultraprecision diamond turning of single-crystal SiC for curved microstructures
Authors
Keywords
-
Journal
INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE
Volume 191, Issue -, Pages 104063
Publisher
Elsevier BV
Online
2023-07-31
DOI
10.1016/j.ijmachtools.2023.104063
References
Ask authors/readers for more resources
Related references
Note: Only part of the references are listed.- Brittle‒ductile transition behavior of 6H-SiC in oblique diamond cutting
- (2023) Shuo Zhang et al. INTERNATIONAL JOURNAL OF MECHANICAL SCIENCES
- Molecular simulation of the plastic deformation and crack formation in single grit grinding of 4H-SiC single crystal
- (2023) Shang Gao et al. INTERNATIONAL JOURNAL OF MECHANICAL SCIENCES
- On the deformation mechanism of SiC under nano-scratching: An experimental investigation
- (2023) Jiahao Hu et al. WEAR
- Surface deformation, phase transition and dislocation mechanisms of single crystalline 6H-SiC in oblique nano-cutting
- (2022) Shuo Zhang et al. APPLIED SURFACE SCIENCE
- Improvement mechanism of brittle-plastic transition and residual stress in scratching 4H–SiC implanted by hydrogen ions
- (2022) Qiang Kang et al. CERAMICS INTERNATIONAL
- Dislocations in 4H silicon carbide
- (2022) Jiajun Li et al. JOURNAL OF PHYSICS D-APPLIED PHYSICS
- Formation of high density stacking faults in polycrystalline 3C-SiC by vibration-assisted diamond cutting
- (2022) Liang Zhao et al. JOURNAL OF THE EUROPEAN CERAMIC SOCIETY
- Ultraprecision tool-servo cutting of pure nickel for fabricating micro/nanostructure arrays
- (2022) Hanheng Du et al. MATERIALS & DESIGN
- Effect of tool geometry on ultraprecision machining of soft-brittle materials: a comprehensive review
- (2022) Weihai Huang et al. International Journal of Extreme Manufacturing
- Atomistic origin of brittle-to-ductile transition behavior of polycrystalline 3C–SiC in diamond cutting
- (2021) Liang Zhao et al. CERAMICS INTERNATIONAL
- Advances in laser assisted machining of hard and brittle materials
- (2020) Kaiyuan You et al. Journal of Manufacturing Processes
- Fabrication of infrared hexagonal microlens array by novel diamond turning method and precision glass molding
- (2019) Lin Zhang et al. JOURNAL OF MICROMECHANICS AND MICROENGINEERING
- Highly efficient planarization of sliced 4H–SiC (0001) wafer by slurryless electrochemical mechanical polishing
- (2019) Xu Yang et al. INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE
- Brittle-to-ductile transition in elliptical vibration-assisted diamond cutting of reaction-bonded silicon carbide
- (2019) Junjie Zhang et al. Journal of Manufacturing Processes
- Cutting forces in fast-/slow tool servo diamond turning of micro-structured surfaces
- (2018) Zhiwei Zhu et al. INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE
- A novel ductile machining model of single-crystal silicon for freeform surfaces with large azimuthal height variation by ultra-precision fly cutting
- (2018) Zhanwen Sun et al. INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE
- Ductile machining of single-crystal silicon for microlens arrays by ultraprecision diamond turning using a slow tool servo
- (2017) Mao Mukaida et al. INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE
- Nano-scale elastic-plastic properties and indentation-induced deformation of single crystal 4H-SiC
- (2017) A. Nawaz et al. Journal of the Mechanical Behavior of Biomedical Materials
- Design methodology for a confocal imaging system using an objective microlens array with an increased working distance
- (2016) Woojae Choi et al. Scientific Reports
- The mechanism of ductile deformation in ductile regime machining of 6H SiC
- (2015) Gaobo Xiao et al. COMPUTATIONAL MATERIALS SCIENCE
- Shape adaptive grinding of CVD silicon carbide
- (2014) Anthony Beaucamp et al. CIRP ANNALS-MANUFACTURING TECHNOLOGY
- Damage-free machining of monocrystalline silicon carbide
- (2013) Hiroaki Tanaka et al. CIRP ANNALS-MANUFACTURING TECHNOLOGY
- Optimized tool path generation for fast tool servo diamond turning of micro-structured surfaces
- (2012) De Ping Yu et al. INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY
- Brittle–ductile transition during diamond turning of single crystal silicon carbide
- (2012) Saurav Goel et al. INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE
- A quantitative assessment of nanometric machinability of major polytypes of single crystal silicon carbide
- (2012) Xichun Luo et al. JOURNAL OF THE EUROPEAN CERAMIC SOCIETY
- Plasma assisted polishing of single crystal SiC for obtaining atomically flat strain-free surface
- (2011) K. Yamamura et al. CIRP ANNALS-MANUFACTURING TECHNOLOGY
- Molecular dynamics simulation model for the quantitative assessment of tool wear during single point diamond turning of cubic silicon carbide
- (2011) Saurav Goel et al. COMPUTATIONAL MATERIALS SCIENCE
- Study on tool wear characteristics in diamond turning of reaction-bonded silicon carbide
- (2011) Zhiyu Zhang et al. INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY
- Atomistic aspects of ductile responses of cubic silicon carbide during nanometric cutting
- (2011) Saurav Goel et al. Nanoscale Research Letters
- Mechanism for material removal in diamond turning of reaction-bonded silicon carbide
- (2009) Jiwang Yan et al. INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE
Find Funding. Review Successful Grants.
Explore over 25,000 new funding opportunities and over 6,000,000 successful grants.
ExploreDiscover Peeref hubs
Discuss science. Find collaborators. Network.
Join a conversation