Surface deformation, phase transition and dislocation mechanisms of single crystalline 6H-SiC in oblique nano-cutting
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Title
Surface deformation, phase transition and dislocation mechanisms of single crystalline 6H-SiC in oblique nano-cutting
Authors
Keywords
6H-SiC, Oblique nano-cutting, Phase transition, Dislocation, MD simulation
Journal
APPLIED SURFACE SCIENCE
Volume 588, Issue -, Pages 152944
Publisher
Elsevier BV
Online
2022-03-03
DOI
10.1016/j.apsusc.2022.152944
References
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