Low‐Power and Fast‐Response Limiting Current‐Type Oxygen Microsensor with a Wide Range Oxygen Concentration

Limiting current type yttria-stabilized zirconia thin-film oxygen sensor with spiral Ta2O5 gas diffusion layer

(2020) Shunsuke Akasaka et al.   SENSORS AND ACTUATORS B-CHEMICAL

Ultrahigh temperature platinum microheater encapsulated by reduced-TiO2 barrier layer

(2019) Shunsuke Akasaka et al.   SENSORS AND ACTUATORS A-PHYSICAL

Thin film YSZ-based limiting current-type oxygen and humidity sensor on thermally oxidized silicon substrates

(2016) Shunsuke Akasaka   SENSORS AND ACTUATORS B-CHEMICAL

Fast response integrated MEMS microheaters for ultra low power gas detection

(2015) Qin Zhou et al.   SENSORS AND ACTUATORS A-PHYSICAL

Design, Fabrication, and Characterization of a High-Heating-Efficiency 3-D Microheater for Catalytic Gas Sensors

(2012) Lei Xu et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

A highly sensitive methane sensor with nickel alloy microheater on micromachined Si substrate

(2012) S. Roy et al.   SOLID-STATE ELECTRONICS

Fabrication and performance of free-standing hydrogen gas sensors

(2007) Lionel Fabrice Houlet et al.   SENSORS AND ACTUATORS B-CHEMICAL