Ultrahigh temperature platinum microheater encapsulated by reduced-TiO2 barrier layer

Published 2019 View Full Article

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Title
Ultrahigh temperature platinum microheater encapsulated by reduced-TiO2 barrier layer
Authors
Keywords
Reliable, High temperature, Microhotplate, Pt microheater, Reduced TiO, 2, Gas sensor
Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 296, Issue -, Pages 286-291
Publisher
Elsevier BV
Online
2019-07-11
DOI
10.1016/j.sna.2019.07.023

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