Limiting current type yttria-stabilized zirconia thin-film oxygen sensor with spiral Ta2O5 gas diffusion layer

Ultrahigh temperature platinum microheater encapsulated by reduced-TiO2 barrier layer

(2019) Shunsuke Akasaka et al.   SENSORS AND ACTUATORS A-PHYSICAL

Measuring Regional Atmospheric CO2 Concentrations in the Lower Troposphere with a Non-Dispersive Infrared Analyzer Mounted on a UAV, Ogata Village, Akita, Japan

(2019) Takashi Chiba et al.   Atmosphere

Low temperature humidity sensor based on Ge nanowires selectively grown on suspended microhotplates

(2017) Jordi Samà et al.   SENSORS AND ACTUATORS B-CHEMICAL

Thin film YSZ-based limiting current-type oxygen and humidity sensor on thermally oxidized silicon substrates

(2016) Shunsuke Akasaka   SENSORS AND ACTUATORS B-CHEMICAL

Fast response integrated MEMS microheaters for ultra low power gas detection

(2015) Qin Zhou et al.   SENSORS AND ACTUATORS A-PHYSICAL

Characterization of porous Pt films deposited via sputtering

(2013) Ikwhang Chang et al.   APPLIED SURFACE SCIENCE

Fabrication of porous and pillar-shaped Mg by magnetron sputtering

(2013) B. Ham et al.   THIN SOLID FILMS

Design, Fabrication, and Characterization of a High-Heating-Efficiency 3-D Microheater for Catalytic Gas Sensors

(2012) Lei Xu et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

A highly sensitive methane sensor with nickel alloy microheater on micromachined Si substrate

(2012) S. Roy et al.   SOLID-STATE ELECTRONICS

Nanoporous gold bumps for low temperature bonding

(2011) Hermann Oppermann et al.   MICROELECTRONICS RELIABILITY

Fabrication and performance of free-standing hydrogen gas sensors

(2007) Lionel Fabrice Houlet et al.   SENSORS AND ACTUATORS B-CHEMICAL