A highly sensitive methane sensor with nickel alloy microheater on micromachined Si substrate

Published 2012 View Full Article

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Title
A highly sensitive methane sensor with nickel alloy microheater on micromachined Si substrate
Authors
Keywords
-
Journal
SOLID-STATE ELECTRONICS
Volume 76, Issue -, Pages 84-90
Publisher
Elsevier BV
Online
2012-07-11
DOI
10.1016/j.sse.2012.05.040

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