Endurance Study of Silicon-Doped Hafnium Oxide (HSO) and Zirconium-Doped Hafnium Oxide (HZO)-Based FeFET Memory

Title
Endurance Study of Silicon-Doped Hafnium Oxide (HSO) and Zirconium-Doped Hafnium Oxide (HZO)-Based FeFET Memory
Authors
Keywords
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Journal
IEEE TRANSACTIONS ON ELECTRON DEVICES
Volume 70, Issue 11, Pages 5645-5650
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2023-10-10
DOI
10.1109/ted.2023.3316138

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