Semantic Segmentation-Based Wafer Map Mixed-Type Defect Pattern Recognition
Published 2023 View Full Article
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Title
Semantic Segmentation-Based Wafer Map Mixed-Type Defect Pattern Recognition
Authors
Keywords
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Journal
IEEE TRANSACTIONS ON COMPUTER-AIDED DESIGN OF INTEGRATED CIRCUITS AND SYSTEMS
Volume 42, Issue 11, Pages 4065-4074
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2023-05-11
DOI
10.1109/tcad.2023.3274958
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