Axial Dependence of the Longitudinal RF Magnetic Field and Plasma Parameters in an Inductive Plasma Source with an External Magnetic Field

Title
Axial Dependence of the Longitudinal RF Magnetic Field and Plasma Parameters in an Inductive Plasma Source with an External Magnetic Field
Authors
Keywords
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Journal
PLASMA PHYSICS REPORTS
Volume 48, Issue 11, Pages 1189-1198
Publisher
Pleiades Publishing Ltd
Online
2022-12-27
DOI
10.1134/s1063780x22601298

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