Low-pressure radio-frequency inductive discharge and possibilities of optimizing inductive plasma sources

Published 2008 View Full Article

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Title
Low-pressure radio-frequency inductive discharge and possibilities of optimizing inductive plasma sources
Authors
Keywords
-
Journal
PHYSICS-USPEKHI
Volume 51, Issue 5, Pages 493-512
Publisher
Uspekhi Fizicheskikh Nauk (UFN) Journal
Online
2008-08-27
DOI
10.1070/pu2008v051n05abeh006422

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