Power absorption, plasma parameters and wave structure in inductive RF plasma source with low value external magnetic field

Title
Power absorption, plasma parameters and wave structure in inductive RF plasma source with low value external magnetic field
Authors
Keywords
-
Journal
PLASMA SCIENCE & TECHNOLOGY
Volume 22, Issue 11, Pages 115404
Publisher
IOP Publishing
Online
2020-08-20
DOI
10.1088/2058-6272/abb0dc

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