Plasma parameters in a twin-chamber RF inductive plasma source, placed in a weak external magnetic field

Published 2019 View Full Article

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Title
Plasma parameters in a twin-chamber RF inductive plasma source, placed in a weak external magnetic field
Authors
Keywords
-
Journal
VACUUM
Volume 169, Issue -, Pages 108927
Publisher
Elsevier BV
Online
2019-09-07
DOI
10.1016/j.vacuum.2019.108927

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