MEMS enabled suspended silicon waveguide platform for long-wave infrared modulation applications
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Title
MEMS enabled suspended silicon waveguide platform for long-wave infrared modulation applications
Authors
Keywords
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Journal
International Journal of Optomechatronics
Volume 16, Issue 1, Pages 42-57
Publisher
Informa UK Limited
Online
2022-12-06
DOI
10.1080/15599612.2022.2137608
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