Modelling and validation of air damping in perforated gold and silicon MEMS plates

Published 2009 View Full Article

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Title
Modelling and validation of air damping in perforated gold and silicon MEMS plates
Authors
Keywords
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Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 20, Issue 1, Pages 015010
Publisher
IOP Publishing
Online
2009-11-28
DOI
10.1088/0960-1317/20/1/015010
References
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