Fabrication and properties of N-doped top layer of Ga2O3 films by magnetron sputtering
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Title
Fabrication and properties of N-doped top layer of Ga2O3 films by magnetron sputtering
Authors
Keywords
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Journal
APPLIED SURFACE SCIENCE
Volume 604, Issue -, Pages 154666
Publisher
Elsevier BV
Online
2022-08-28
DOI
10.1016/j.apsusc.2022.154666
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