Investigation of Heater Structures for Thermal Conductivity Measurements of SiO2 and Al2O3 Thin Films Using the 3-Omega Method

Title
Investigation of Heater Structures for Thermal Conductivity Measurements of SiO2 and Al2O3 Thin Films Using the 3-Omega Method
Authors
Keywords
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Journal
Nanomaterials
Volume 12, Issue 11, Pages 1928
Publisher
MDPI AG
Online
2022-06-04
DOI
10.3390/nano12111928

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