Investigation of Heater Structures for Thermal Conductivity Measurements of SiO2 and Al2O3 Thin Films Using the 3-Omega Method
出版年份 2022 全文链接
标题
Investigation of Heater Structures for Thermal Conductivity Measurements of SiO2 and Al2O3 Thin Films Using the 3-Omega Method
作者
关键词
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出版物
Nanomaterials
Volume 12, Issue 11, Pages 1928
出版商
MDPI AG
发表日期
2022-06-04
DOI
10.3390/nano12111928
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