Dielectric breakdown in HfO2 dielectrics: Using multiscale modeling to identify the critical physical processes involved in oxide degradation
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Title
Dielectric breakdown in HfO2 dielectrics: Using multiscale modeling to identify the critical physical processes involved in oxide degradation
Authors
Keywords
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Journal
JOURNAL OF APPLIED PHYSICS
Volume 131, Issue 23, Pages 234501
Publisher
AIP Publishing
Online
2022-06-21
DOI
10.1063/5.0083189
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