The influence of substrate bias on the surface morphology, microstructure and mechanical behaviour of TiNiN coatings

Title
The influence of substrate bias on the surface morphology, microstructure and mechanical behaviour of TiNiN coatings
Authors
Keywords
-
Journal
APPLIED SURFACE SCIENCE
Volume 590, Issue -, Pages 153107
Publisher
Elsevier BV
Online
2022-03-19
DOI
10.1016/j.apsusc.2022.153107

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