Deposition of TiSiN coatings by arc ion plating process

Title
Deposition of TiSiN coatings by arc ion plating process
Authors
Keywords
-
Journal
APPLIED SURFACE SCIENCE
Volume 254, Issue 10, Pages 3130-3136
Publisher
Elsevier BV
Online
2008-01-10
DOI
10.1016/j.apsusc.2007.10.079

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