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Title
Argon ion beam induced surface pattern formation on Si
Authors
Keywords
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Journal
JOURNAL OF APPLIED PHYSICS
Volume 119, Issue 3, Pages 035302
Publisher
AIP Publishing
Online
2016-01-20
DOI
10.1063/1.4940141
References
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Related references
Note: Only part of the references are listed.- Model for roughening and ripple instability due to ion-induced mass redistribution [Addendum to H. Hofsäss, Appl. Phys. A 114 (2014) 401, “Surface instability and pattern formation by ion-induced erosion and mass redistribution”]
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- Tuning the quality of nanoscale ripple patterns by sequential ion-beam sputtering
- (2010) Adrian Keller et al. PHYSICAL REVIEW B
- Ion-Induced Nanoscale Ripple Patterns on Si Surfaces: Theory and Experiment
- (2010) Adrian Keller et al. Materials
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