Is keV ion-induced pattern formation on Si(001) caused by metal impurities?

Title
Is keV ion-induced pattern formation on Si(001) caused by metal impurities?
Authors
Keywords
-
Journal
NANOTECHNOLOGY
Volume 21, Issue 8, Pages 085301
Publisher
IOP Publishing
Online
2010-01-26
DOI
10.1088/0957-4484/21/8/085301

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