Low leakage ZrO2 based capacitors for sub 20 nm dynamic random access memory technology nodes

Conduction barrier offset engineering for DRAM capacitor scaling

(2016) Milan Pešić et al.   SOLID-STATE ELECTRONICS

Ultra-thin ZrO2/SrO/ZrO2 insulating stacks for future dynamic random access memory capacitor applications

(2015) Steve Knebel et al.   JOURNAL OF APPLIED PHYSICS

Evaluating the Top Electrode Material for Achieving an Equivalent Oxide Thickness Smaller than 0.4 nm from an Al-Doped TiO2 Film

(2014) Woojin Jeon et al.   ACS Applied Materials & Interfaces

Low leakage Ru-strontium titanate-Ru metal-insulator-metal capacitors for sub-20 nm technology node in dynamic random access memory

(2014) M. Popovici et al.   APPLIED PHYSICS LETTERS

Conduction Mechanisms and Breakdown Characteristics of $\hbox{Al}_{2}\hbox{O}_{3}$-Doped $\hbox{ZrO}_{2}$ High-$k$ Dielectrics for Three-Dimensional Stacked Metal–Insulator–Metal Capacitors

(2012) Steve Knebel et al.   IEEE TRANSACTIONS ON DEVICE AND MATERIALS RELIABILITY

Improvement in the leakage current characteristic of metal-insulator-metal capacitor by adopting RuO2 film as bottom electrode

(2011) Jeong Hwan Han et al.   APPLIED PHYSICS LETTERS

Impact of bottom electrode and SrxTiyOz film formation on physical and electrical properties of metal-insulator-metal capacitors

(2011) M. A. Pawlak et al.   APPLIED PHYSICS LETTERS

Charge transport in dielectrics via tunneling between traps

(2011) K. A. Nasyrov et al.   JOURNAL OF APPLIED PHYSICS

Ultimate scaling of TiN/ZrO2/TiN capacitors: Leakage currents and limitations due to electrode roughness

(2011) Gunther Jegert et al.   JOURNAL OF APPLIED PHYSICS

SrTiO3 thin film capacitors on silicon substrates with insignificant interfacial passive layers

(2010) S. Schmelzer et al.   APPLIED PHYSICS LETTERS

Effective-Work-Function Control by Varying the TiN Thickness in Poly-Si/TiN Gate Electrodes for Scaled High- $k$ CMOSFETs

(2009) M. Kadoshima et al.   IEEE ELECTRON DEVICE LETTERS

Photoconductivity of Hf-based binary metal oxide systems

(2008) S. Shamuilia et al.   JOURNAL OF APPLIED PHYSICS