Evaluating the Top Electrode Material for Achieving an Equivalent Oxide Thickness Smaller than 0.4 nm from an Al-Doped TiO2 Film

Published 2014 View Full Article

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Title
Evaluating the Top Electrode Material for Achieving an Equivalent Oxide Thickness Smaller than 0.4 nm from an Al-Doped TiO2 Film
Authors
Keywords
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Journal
ACS Applied Materials & Interfaces
Volume 6, Issue 23, Pages 21632-21637
Publisher
American Chemical Society (ACS)
Online
2014-11-18
DOI
10.1021/am506677e

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