Ultra-thin ZrO2/SrO/ZrO2 insulating stacks for future dynamic random access memory capacitor applications

Low leakage Ru-strontium titanate-Ru metal-insulator-metal capacitors for sub-20 nm technology node in dynamic random access memory

(2014) M. Popovici et al.   APPLIED PHYSICS LETTERS

Structural and dielectric properties of sputtered SrxZr(1−x)Oy

(2013) Matthias Grube et al.   JOURNAL OF APPLIED PHYSICS

Mesoscopic analysis of leakage current suppression in ZrO2/Al2O3/ZrO2 nano-laminates

(2013) Dominik Martin et al.   JOURNAL OF APPLIED PHYSICS

TiO2-based structures for nanoscale memory applications

(2013) K. Fröhlich   MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING

Reliability of $\hbox{SrRuO}_{3}\hbox{/SrTiO}_{3}\hbox{/SrRuO}_{3}$ Stacks for DRAM Applications

(2012) S. Kupke et al.   IEEE ELECTRON DEVICE LETTERS

Reliability of Al2O3-doped ZrO2 high-k dielectrics in three-dimensional stacked metal-insulator-metal capacitors

(2010) Dayu Zhou et al.   JOURNAL OF APPLIED PHYSICS

Band gaps and electronic structure of alkaline-earth and post-transition-metal oxides

(2010) J. A. McLeod et al.   PHYSICAL REVIEW B

First Insight Into the Lifetime Acceleration Model of High-$k$$\hbox{ZrO}_{2}/\hbox{SiO}_{2}/\hbox{ZrO}_{2}$ Stacks for Advanced DRAM Technology Nodes

(2009) R. Agaiby et al.   IEEE ELECTRON DEVICE LETTERS

Phase stability and dielectric constant of ABO3 perovskites from first principles

(2009) Alfred Kersch et al.   JOURNAL OF APPLIED PHYSICS

Impact of interface variations on J–V and C–V polarity asymmetry of MIM capacitors with amorphous and crystalline Zr(1−x)AlxO2 films

(2009) W. Weinreich et al.   MICROELECTRONIC ENGINEERING

Photoconductivity of Hf-based binary metal oxide systems

(2008) S. Shamuilia et al.   JOURNAL OF APPLIED PHYSICS