Effect of sputtering pressure on microstructure and bolometric properties of Nb:TiO2−x films for infrared image sensor applications

Title
Effect of sputtering pressure on microstructure and bolometric properties of Nb:TiO2−x films for infrared image sensor applications
Authors
Keywords
-
Journal
JOURNAL OF APPLIED PHYSICS
Volume 119, Issue 4, Pages 044504
Publisher
AIP Publishing
Online
2016-01-28
DOI
10.1063/1.4940957

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