Power law fitting of the ion saturation current and the three-temperature Maxwellian EEDF in a multi-dipole confined hot cathode discharge: an experimental revisitation

Title
Power law fitting of the ion saturation current and the three-temperature Maxwellian EEDF in a multi-dipole confined hot cathode discharge: an experimental revisitation
Authors
Keywords
-
Journal
PLASMA SOURCES SCIENCE & TECHNOLOGY
Volume 31, Issue 4, Pages 045002
Publisher
IOP Publishing
Online
2022-03-11
DOI
10.1088/1361-6595/ac5c61

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